TY - DATA T1 - Plasma parameters in an Ar-HMDSO DBD at atmospheric pressure for plasma-polymerization experiments AU - Loffhagen, Detlef AU - Becker, Markus M. DO - 10.34711/INPTDAT.106 UR - https://www.inptdat.de/node/106 AB - The plasma parameters of a large-area dielectric barrier discharge (DBD) in argon-HMDSO mixtures containing up to about 1600 ppm of the monomer are investigated by means of numerical modelling. A time-dependent, spatially one-dimensional fluid model is applied, taking into account the spatial variation of the discharge plasma between plane-parallel dielectrics covering the electrodes. The dataset contains values of power dissipated in the DBD as well as the space- and period-averaged density and mean energy of the electrons as a function of HMDSO admixture. KW - plasma parameters KW - DBD KW - HMDSO KW - plasma modelling/simulation KW - plasma polymerization PY - 2019 PB - INPTDAT ER -