TY - DATA T1 - Benchmark data for fluid modelling of low-pressure CCRF discharge plasmas AU - Becker, Markus M. AU - Kählert, Hanno AU - Sun, Anbang AU - Loffhagen, Detlef DO - 10.34711/INPTDAT.72 UR - https://www.inptdat.de/node/72 AB - The dataset contains data from comparative studies of capacitively coupled radio-frequency (CCRF) discharges in helium and argon at pressures between 10 and 80 Pa applying two different fluid modeling approaches as well as two independently developed particle-in-cell Monte Carlo collision (PIC-MCC) codes. The dataset provides a test bed for future studies of simple ccrf discharge configurations in helium and argon at pressures ranging from 10 to 80 Pa. KW - plasma modelling/simulation KW - benchmark data PY - 2019 PB - INPTDAT ER -